
Introduction to Focused Ion Beam Nanometrology
In stock
Introduction to Focused Ion Beam Nanometrology
$25.00
This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas.
Book Details
- Author: David C. Cox
- Publisher: IOP Concise Physics
- eBook ISBN: 9781681740843, 1681740842
- Print ISBN: 9781681740201, 1681740206
Product Details
You May Also Like
View all →
Advances in Computer Science and Information Technology: First International Conference on Computer Science and Information Technology, CCSIT 2011, Bangalore, India, January 2-4, 2011. Proceedings, Part I

Designing Democracy Re-education and the America Houses (19451961)- The American Information Centers and their Involvement in Democratic: Re-education in Western Germany and West Berlin from 1945 to 1961

Advances in Neuroergonomics and Cognitive Engineering: Proceedings of the AHFE 2016 International Conference on Neuroergonomics and Cognitive Engineering, July 27-31, 2016, Walt Disney World®, Florida, USA

